Fabrication of MEMS composite-polymer gas sensor arrays for electronic nose

TitleFabrication of MEMS composite-polymer gas sensor arrays for electronic nose
Publication TypeJournal Article
Year of Publication2007
AuthorsPant, BD, Kutnar, M, Lakshmi, S, Arora, A, Prasad, M, Sharma, A, Patel, M, Radhakrishnan, S, Dwivedi, VK
JournalIndian Journal of Pure & Applied Physics
Volume45
Issue4
Pagination321-325
Date PublishedAPR
Type of ArticleArticle, Proceeding Paper
ISSN0019-5596
Keywordscomposite polymer, conducting polymer, electronic nose, polymer gas sensor, selectivity, sensitivity, sensor array
Abstract

Sensor arrays capable of sensing different gases combined with a sampling system and a means of pattern classification and recognition comprise a basic system for an `Electronic Nose' In the present work, a complete process for the fabrication of micro-cavities with sensing electrodes and volumes ranging from 2.5 to 12 nano-liters for the development of polymer gas sensors has been reported. An array of eight sensing cells in four sizes have been fabricated using SU-8 negative tone resist through UV-LIGA process developed at CEERI, Pilani. The length and width of the SU-8 cavities are: 250 x 250, 300 x 300, 500 x 500 and 500 x 600 micron and the depth of each of them was optimized to be 40 micron. These cavities filled with different polymer composites comprise the basic sensing cells for a variety of gases. The current paper presents the salient features of the fabrication process in detail and the results obtained in ethanol and methanol ambient using a polymer composite developed through dissolution of styrene and polyaniline in PMMA. A number of other composites such as Pc-Ppy, Pr-Ppy, Fc(+)-PPy have also been synthesized and tested for a high sensitivity in carbon monoxide.

Type of Journal (Indian or Foreign)

Indian

Impact Factor (IF)0.739
Divison category: 
Polymer Science & Engineering