Fabrication of MEMS composite-polymer gas sensor arrays for electronic nose
Title | Fabrication of MEMS composite-polymer gas sensor arrays for electronic nose |
Publication Type | Journal Article |
Year of Publication | 2007 |
Authors | Pant, BD, Kutnar, M, Lakshmi, S, Arora, A, Prasad, M, Sharma, A, Patel, M, Radhakrishnan, S, Dwivedi, VK |
Journal | Indian Journal of Pure & Applied Physics |
Volume | 45 |
Issue | 4 |
Pagination | 321-325 |
Date Published | APR |
Type of Article | Article, Proceeding Paper |
ISSN | 0019-5596 |
Keywords | composite polymer, conducting polymer, electronic nose, polymer gas sensor, selectivity, sensitivity, sensor array |
Abstract | Sensor arrays capable of sensing different gases combined with a sampling system and a means of pattern classification and recognition comprise a basic system for an `Electronic Nose' In the present work, a complete process for the fabrication of micro-cavities with sensing electrodes and volumes ranging from 2.5 to 12 nano-liters for the development of polymer gas sensors has been reported. An array of eight sensing cells in four sizes have been fabricated using SU-8 negative tone resist through UV-LIGA process developed at CEERI, Pilani. The length and width of the SU-8 cavities are: 250 x 250, 300 x 300, 500 x 500 and 500 x 600 micron and the depth of each of them was optimized to be 40 micron. These cavities filled with different polymer composites comprise the basic sensing cells for a variety of gases. The current paper presents the salient features of the fabrication process in detail and the results obtained in ethanol and methanol ambient using a polymer composite developed through dissolution of styrene and polyaniline in PMMA. A number of other composites such as Pc-Ppy, Pr-Ppy, Fc(+)-PPy have also been synthesized and tested for a high sensitivity in carbon monoxide. |
Type of Journal (Indian or Foreign) | Indian |
Impact Factor (IF) | 0.739 |