TY - JOUR T1 - Fabrication of MEMS composite-polymer gas sensor arrays for electronic nose JF - Indian Journal of Pure & Applied Physics Y1 - 2007 A1 - Pant, B. D. A1 - Kutnar, Mahesh A1 - Lakshmi, Subha A1 - Arora, Anil A1 - Prasad, Mahanth A1 - Sharma, Akshdeep A1 - Patel, Mohan A1 - Radhakrishnan, S. A1 - Dwivedi, V. K. KW - composite polymer KW - conducting polymer KW - electronic nose KW - polymer gas sensor KW - selectivity KW - sensitivity KW - sensor array AB -

Sensor arrays capable of sensing different gases combined with a sampling system and a means of pattern classification and recognition comprise a basic system for an `Electronic Nose' In the present work, a complete process for the fabrication of micro-cavities with sensing electrodes and volumes ranging from 2.5 to 12 nano-liters for the development of polymer gas sensors has been reported. An array of eight sensing cells in four sizes have been fabricated using SU-8 negative tone resist through UV-LIGA process developed at CEERI, Pilani. The length and width of the SU-8 cavities are: 250 x 250, 300 x 300, 500 x 500 and 500 x 600 micron and the depth of each of them was optimized to be 40 micron. These cavities filled with different polymer composites comprise the basic sensing cells for a variety of gases. The current paper presents the salient features of the fabrication process in detail and the results obtained in ethanol and methanol ambient using a polymer composite developed through dissolution of styrene and polyaniline in PMMA. A number of other composites such as Pc-Ppy, Pr-Ppy, Fc(+)-PPy have also been synthesized and tested for a high sensitivity in carbon monoxide.

PB - NATL INST SCIENCE COMMUNICATION CY - DR K S KRISHNAN MARG, NEW DELHI 110 012, INDIA VL - 45 IS - 4 N1 - Indo-Chinese Workshop on Micro Electron Mechanical Systems (MEMS) and Related Technologies, Natl Phys Lab, New Delhi, INDIA, APR 05-07, 2006 U3 -

Indian

U4 - 0.739 ER -