Synthesis of orthorhombic-molybdenum trioxide (α-MoO3) thin films by hot wire-CVD and investigations of its humidity sensing properties
| Title | Synthesis of orthorhombic-molybdenum trioxide (α-MoO3) thin films by hot wire-CVD and investigations of its humidity sensing properties |
| Publication Type | Journal Article |
| Year of Publication | 2017 |
| Authors | Jadkar, V, Pawbake, AS, Waykar, RG, Jadhavar, AArjun, Mayabadi, A, Date, A, Late, DJ, Pathan, HM, Gosavi, SW, Jadkar, SR |
| Journal | Journal of Materials Science Materials in Electronics |
| Volume | 1 |
| Issue | 7 |
| Date Published | JUL |
| Type of Article | Article |
| Abstract | In present work, we report synthesis of orthorhombic-molybdenum trioxide (α-MoO 3) thin films using home-build hot wire-CVD (HW-CVD) method simply by heating the Mo filament in a controlled O 2 atmosphere. The formation of α-MoO 3 was confirmed by low angle-XRD and Raman spectroscopy. Low angle-XRD analysis revealed that α-MoO 3 crystallites have orientations along (110), (101) and (111) directions while Raman spectroscopy analysis shows two prominent vibrational modes ~819 and ~994 cm −1 associated with Mo 2–O and Mo=O respectively. SEM and TEM analysis show the formation of nano-sheets like morphology of α-MoO 3 thin films. The SAED pattern shows highly crystalline nature of α-MoO 3. The humidity-sensing properties were investigated at room temperature by fabricating the two probe device. The humidity sensing results showed n-type behavior of α-MoO 3. The maximum humidity sensitivity of ~6957% along with response time of ~66 s and recovery time of ~5 s were observed for α-MoO 3 thin film humidity sensor device. Our results have opened up a new avenue to grow α-MoO 3 for humidity sensor applications. |
| DOI | 10.1007/s10854-017-7473-6 |
| Type of Journal (Indian or Foreign) | Foreign |
| Impact Factor (IF) | 1.798 |
Divison category:
Physical and Materials Chemistry
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