Synthesis of gamma-WO3 thin films by hot wire-CVD and investigation of its humidity sensing properties
| Title | Synthesis of gamma-WO3 thin films by hot wire-CVD and investigation of its humidity sensing properties |
| Publication Type | Journal Article |
| Year of Publication | 2017 |
| Authors | Jadkar, V, Pawbake, A, Waykar, R, Jadhavar, A, Date, A, Late, D, Pathan, H, Gosavi, S, Jadkar, S |
| Journal | Physica Status Solidi A-Applications and Materials Science |
| Volume | 214 |
| Issue | 5 |
| Pagination | Article Number: 1600717 |
| Date Published | MAY |
| Type of Article | Article |
| Abstract | In this study, monoclinic tungsten oxide (gamma-WO3) have been grown in a single step using HW-CVD method by resistively heating W filaments in a constant O-2 pressure. The formation of gamma-WO3 was confirmed using low angle-XRD and Raman spectroscopy analysis. Low angle-XRD analysis revealed that as-deposited WO3 film are highly crystalline and the crystallites have preferred orientation along the (002) direction. HRTEM analysis and SAED pattern also show the highly crystalline nature of WO3 with d spacing of similar to 0.38 nm, having an orientation along the (002) direction. Surface topography investigated by SEM analysis shows the formation of a uniform and homogeneous cauliflower like morphology throughout the substrate surface without flaws and cracks. A humidity sensing device incorporating WO3 is also fabricated, which shows a maximum humidity sensitivity factor of similar to 3954% along with a response time of similar to 14 s and a recovery time of similar to 25 s. The obtained results demonstrate that it is possible to synthesize WO3 in a single step by HW-CVD method and to fabricate a humidity sensor by using it. (C) 2017 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim |
| DOI | 10.1002/pssa.201600717 |
| Type of Journal (Indian or Foreign) | Foreign |
| Impact Factor (IF) | 1.648 |
Divison category:
Physical and Materials Chemistry
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