Photopatternable nano-composite (SU-8/ZnO) thin films for piezo-electric applications

TitlePhotopatternable nano-composite (SU-8/ZnO) thin films for piezo-electric applications
Publication TypeJournal Article
Year of Publication2012
AuthorsKandpal, M, Sharan, C, Poddar, P, Prashanthi, K, Apte, PR, V. Rao, R
JournalApplied Physics Letters
Volume101
Issue10
Pagination104102
Date PublishedSEP
ISSN0003-6951
Abstract

Photo-curable nanocomposite material was formulated by embedding ZnO nanoparticles into a SU-8 matrix and studied for its piezoelectric properties for low cost fabrication of self-powered nanodevices. The piezoelectric coefficient of ZnO nanoparticles was observed to be ranging between 15 and 23 pm/V, which is the highest reported. These experimental studies support the recent theoretical predictions where the piezoelectric coefficients in ZnO nanoparticles were found to be higher compared to the thin films because of the surface relaxation induced volume reductions in the nanometer scale. The photo-curable property of these polymer composite films is exploited to demonstrate fabrication of a micro-cantilever test structure. (C) 2012 American Institute of Physics. [http://dx.doi.org/10.1063/1.4748575]

DOI10.1063/1.4748575
Type of Journal (Indian or Foreign)Foreign
Impact Factor (IF)3.794
Divison category: 
Physical and Materials Chemistry