Effect of aluminium doping on structural and gas sensing properties of zinc oxide thin films deposited by spray pyrolysis

TitleEffect of aluminium doping on structural and gas sensing properties of zinc oxide thin films deposited by spray pyrolysis
Publication TypeJournal Article
Year of Publication2011
AuthorsBadadhe, SS, Mulla, IS
JournalSensors and Actuators B-Chemical
Volume156
Issue2
Pagination943-948
Date PublishedAUG
ISSN0925-4005
KeywordsAluminium, H(2)S sensor, Spray pyrolysis, thin film, Zinc oxide
Abstract

A facile spray pyrolysis route is used to deposit aluminium doped ZnO (AZO) thin films on to the glass substrates. It is observed that on aluminium doping the particle size of ZnO reduces significantly; moreover, uniformity of particle also gets enhanced. Their XRD study reveals that intensity ratio of crystal planes depend on the aluminium doping concentration. The gas response studies of; similar to 800 nm thick Al-doped ZnO films at different operating temperatures show that 5 at% Al-doped ZnO thin film exhibits highest response towards H(2)S gas at 200 degrees C. The results suggest that the gas response strongly depends on the particle size and aluminium doping in the ZnO. (C) 2011 Elsevier B.V. All rights reserved.

DOI10.1016/j.snb.2011.03.010
Type of Journal (Indian or Foreign)Foreign
Impact Factor (IF)4.34
Divison category: 
Physical and Materials Chemistry