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Filters: Author is Gangal, S. A. and Keyword is RF plasma sputtering  [Clear All Filters]
2005
D. S. Bodas, Mandale, A. B., and Gangal, S. A., “Deposition of PTFE thin films by RF plasma sputtering on < 100 > silicon substrates”, Applied Surface Science, vol. 245, pp. 202-207, 2005.