<?xml version="1.0" encoding="UTF-8"?><xml><records><record><source-app name="Biblio" version="7.x">Drupal-Biblio</source-app><ref-type>17</ref-type><contributors><authors><author><style face="normal" font="default" size="100%">Pant, B. D.</style></author><author><style face="normal" font="default" size="100%">Kutnar, Mahesh</style></author><author><style face="normal" font="default" size="100%">Lakshmi, Subha</style></author><author><style face="normal" font="default" size="100%">Arora, Anil</style></author><author><style face="normal" font="default" size="100%">Prasad, Mahanth</style></author><author><style face="normal" font="default" size="100%">Sharma, Akshdeep</style></author><author><style face="normal" font="default" size="100%">Patel, Mohan</style></author><author><style face="normal" font="default" size="100%">Radhakrishnan, S.</style></author><author><style face="normal" font="default" size="100%">Dwivedi, V. K.</style></author></authors></contributors><titles><title><style face="normal" font="default" size="100%">Fabrication of MEMS composite-polymer gas sensor arrays for electronic nose</style></title><secondary-title><style face="normal" font="default" size="100%">Indian Journal of Pure &amp; Applied Physics</style></secondary-title></titles><keywords><keyword><style  face="normal" font="default" size="100%">composite polymer</style></keyword><keyword><style  face="normal" font="default" size="100%">conducting polymer</style></keyword><keyword><style  face="normal" font="default" size="100%">electronic nose</style></keyword><keyword><style  face="normal" font="default" size="100%">polymer gas sensor</style></keyword><keyword><style  face="normal" font="default" size="100%">selectivity</style></keyword><keyword><style  face="normal" font="default" size="100%">sensitivity</style></keyword><keyword><style  face="normal" font="default" size="100%">sensor array</style></keyword></keywords><dates><year><style  face="normal" font="default" size="100%">2007</style></year><pub-dates><date><style  face="normal" font="default" size="100%">APR</style></date></pub-dates></dates><number><style face="normal" font="default" size="100%">4</style></number><publisher><style face="normal" font="default" size="100%">NATL INST SCIENCE COMMUNICATION</style></publisher><pub-location><style face="normal" font="default" size="100%">DR K S KRISHNAN MARG, NEW DELHI 110 012, INDIA</style></pub-location><volume><style face="normal" font="default" size="100%">45</style></volume><pages><style face="normal" font="default" size="100%">321-325</style></pages><language><style face="normal" font="default" size="100%">eng</style></language><abstract><style face="normal" font="default" size="100%">&lt;p&gt;Sensor arrays capable of sensing different gases combined with a sampling system and a means of pattern classification and recognition comprise a basic system for an `Electronic Nose' In the present work, a complete process for the fabrication of micro-cavities with sensing electrodes and volumes ranging from 2.5 to 12 nano-liters for the development of polymer gas sensors has been reported. An array of eight sensing cells in four sizes have been fabricated using SU-8 negative tone resist through UV-LIGA process developed at CEERI, Pilani. The length and width of the SU-8 cavities are: 250 x 250, 300 x 300, 500 x 500 and 500 x 600 micron and the depth of each of them was optimized to be 40 micron. These cavities filled with different polymer composites comprise the basic sensing cells for a variety of gases. The current paper presents the salient features of the fabrication process in detail and the results obtained in ethanol and methanol ambient using a polymer composite developed through dissolution of styrene and polyaniline in PMMA. A number of other composites such as Pc-Ppy, Pr-Ppy, Fc(+)-PPy have also been synthesized and tested for a high sensitivity in carbon monoxide.&lt;/p&gt;</style></abstract><issue><style face="normal" font="default" size="100%">4</style></issue><work-type><style face="normal" font="default" size="100%">Article, Proceeding Paper</style></work-type><notes><style face="normal" font="default" size="100%">Indo-Chinese Workshop on Micro Electron Mechanical Systems (MEMS) and Related Technologies, Natl Phys Lab, New Delhi, INDIA, APR 05-07, 2006</style></notes><custom3><style face="normal" font="default" size="100%">&lt;p&gt;Indian&lt;/p&gt;</style></custom3><custom4><style face="normal" font="default" size="100%">0.739</style></custom4></record></records></xml>