01632nas a2200205   4500008004100000022001400041245009000055210006900145260012500214300001100339490000800350520082400358100001901182700002701201700001901228700001901247700002201266700001801288856012001306       2012                        eng d  a0003-695100aPhotopatternable nano-composite (SU-8/ZnO) thin films for piezo-electric applications0 aPhotopatternable nanocomposite SU8ZnO thin films for piezoelectr  aCIRCULATION & FULFILLMENT DIV, 2 HUNTINGTON QUADRANGLE, STE 1 N O 1, MELVILLE, NY 11747-4501 USAbAMER INST PHYSICScSEP  a1041020 v1013 a<p>Photo-curable nanocomposite material was formulated by embedding ZnO nanoparticles into a SU-8 matrix and studied for its piezoelectric properties for low cost fabrication of self-powered nanodevices. The piezoelectric coefficient of ZnO nanoparticles was observed to be ranging between 15 and 23 pm/V, which is the highest reported. These experimental studies support the recent theoretical predictions where the piezoelectric coefficients in ZnO nanoparticles were found to be higher compared to the thin films because of the surface relaxation induced volume reductions in the nanometer scale. The photo-curable property of these polymer composite films is exploited to demonstrate fabrication of a micro-cantilever test structure. (C) 2012 American Institute of Physics. [http://dx.doi.org/10.1063/1.4748575]</p>1 aKandpal, Manoj1 aSharan, Chandrashekhar1 aPoddar, Pankaj1 aPrashanthi, K.1 aApte, Prakash, R.1 aRao, Ramgopal  uhttps://library.ncl.res.in/content/photopatternable-nano-composite-su-8zno-thin-films-piezo-electric-applications-002306nas a2200205   4500008004100000022001400041245009900055210006900154260011000223300001600333490000600349520151300355100001901868700001501887700001901902700001501921700001501936700001801951856013101969       2015                        eng d  a2046-206900aSpin-coatable, photopatternable magnetic nanocomposite thin films for MEMS device applications0 aSpincoatable photopatternable magnetic nanocomposite thin films   aTHOMAS GRAHAM HOUSE, SCIENCE PARK, MILTON RD, CAMBRIDGE CB4 0WF, CAMBS, ENGLANDbROYAL SOC CHEMISTRYcOCT  a85741-857470 v53 a<p>Magnetic nanomaterials' (especially metals) air stability and compatibility with standard micro-fabrication technologies are often a concern for development of MEMS-based magnetic devices. In this paper, we report an air-stable, photo-patternable and spin-coatable magnetic thin film preparation process for MEMS applications. This magnetic nanocomposite thin film was prepared by incorporating carbon capped ferromagnetic cobalt nanoparticles of dimension 20-80 nm into the SU-8 matrix. TEM, XRD and EDAX analyses were done, to investigate the crystal structure, dispersion and phase stability of the films. The SQUID magnetometry and MFM measurements of the film confirmed its magnetic response at room temperature and the retention of its magnetic properties over a period of time. The material compatibility for MEMS device applications was demonstrated through fabrication of a suspended circular membrane of radius similar to 250 mu m, having four U-shaped beams, of dimension similar to 270 x 50 mu m each. Three conventional lithography steps and a sacrificial release layer of similar to 1 mm thick oxide was used for the fabrication. The membrane was characterized by evaluating its spring constant and resonant frequency. The spring constant and resonant frequencies were estimated to be similar to 4.2 N m(-1) and similar to 29 kHz respectively. Finally, we demonstrated the actuation of the magnetic membrane by an off-chip generated magnetic field, for its possible use as a MEMS device.</p>1 aKandpal, Manoj1 aSharan, C.1 aPalaparthy, V.1 aTiwary, N.1 aPoddar, P.1 aRao, Ramgopal  uhttps://library.ncl.res.in/content/spin-coatable-photopatternable-magnetic-nanocomposite-thin-films-mems-device-applications-0