01623nas a2200157   4500008004100000020002000041245008100061210006900142260008100211520100500292100001301297700001501310700001601325700001501341856010901356       2017                        eng d  a978-150903001-900aDevelopment of ARM based embedded controller for mass flow controller system0 aDevelopment of ARM based embedded controller for mass flow contr  aChennai, India.bInstitute of Electrical and Electronics Engineers Inc.cOCT3 aThe purpose for this paper is to describe the central Embedded Controller development done for Mass Flow Controllers (MFCs) M100B system. Work caters to control M100B MFCs being used for one of the systems at National Chemical Laboratory. M100B MFC accurately measures and controls the mass flow rates of gases. The central controller for this system is non functional and technology is outdated and hence new central embedded controller is developed for the system. Development is done using ARM7 32-bit RISC microcontroller Philips LPC2148, as low power and high frequency design. Serial ADCs are interfaced to ARM microcontroller. LCD display 20×4 is used for display of run status, diagnostic and error messages. Touch keypad is designed and interfaced for setting of mass flow rate for different MFCs against MFC number selected by keypad. The software development is done using Keil micro vision 4. This ARM based controller is a real time system with display of diagnostic and error messages.1 aIyer, N.1 aShinde, S.1 aDhawale, T.1 aShelar, N.  uhttps://library.ncl.res.in/content/development-arm-based-embedded-controller-mass-flow-controller-system