01985nas a2200229   4500008004100000245010700041210006900148260000800217300002800225490000800253520119900261100001901460700001801479700002101497700002001518700001801538700002001556700001801576700001901594700002001613856012201633       2017                        eng d00aSynthesis of gamma-WO3 thin films by hot wire-CVD and investigation of its humidity sensing properties0 aSynthesis of gammaWO3 thin films by hot wireCVD and investigatio  cMAY  aArticle Number: 16007170 v2143 aIn this study, monoclinic tungsten oxide (gamma-WO3) have been grown in a single step using HW-CVD method by resistively heating W filaments in a constant O-2 pressure. The formation of gamma-WO3 was confirmed using low angle-XRD and Raman spectroscopy analysis. Low angle-XRD analysis revealed that as-deposited WO3 film are highly crystalline and the crystallites have preferred orientation along the (002) direction. HRTEM analysis and SAED pattern also show the highly crystalline nature of WO3 with d spacing of similar to 0.38 nm, having an orientation along the (002) direction. Surface topography investigated by SEM analysis shows the formation of a uniform and homogeneous cauliflower like morphology throughout the substrate surface without flaws and cracks. A humidity sensing device incorporating WO3 is also fabricated, which shows a maximum humidity sensitivity factor of similar to 3954% along with a response time of similar to 14 s and a recovery time of similar to 25 s. The obtained results demonstrate that it is possible to synthesize WO3 in a single step by HW-CVD method and to fabricate a humidity sensor by using it. (C) 2017 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim1 aJadkar, Vijaya1 aPawbake, Amit1 aWaykar, Ravindra1 aJadhavar, Ashok1 aDate, Abhijit1 aLate, Dattatray1 aPathan, Habib1 aGosavi, Suresh1 aJadkar, Sandesh  uhttps://library.ncl.res.in/content/synthesis-gamma-wo3-thin-films-hot-wire-cvd-and-investigation-its-humidity-sensing